Electric Linear Slide EZS Series for Clean Room Use Particle Generation Amount

Particle Generation Amount for Clean Room Use

The EZS Series has achieved ISO Standards Class 3 (equivalent to FED Standard Class 1) with improved airtightness through the use of low correlation grease and stainless steel sheet.

Measurement Method

Cleanliness class is measured in accordance with "JIS B 9926."

Measurement Method

[ISO Standards]

Class/Particle Size (μm) Class 3
0.1 1000 max.
0.3 102 max.
0.5 35 max.

Correlation Diagram of Particle Generation Amount and Suction Volume (Actual measurement values from the sample data)

  • Correlation Diagram of EZS3 Particle Generation Amount and Suction Volume
  • Correlation Diagram of EZS4 Particle Generation Amount and Suction Volume
  • Correlation Diagram of EZS6 Particle Generation Amount and Suction Volume
  • *The product names on the characteristics diagram are listed such that the product names are distinguishable.
    The characteristics of AR Series-Equipped products are the same as those of AZ Series-Equipped products..