αSTEP AZ Series Product Line
Drivers
Compatible Interface | Driver Type | ||
---|---|---|---|
Single Axis Driver
![]() |
mini Driver
![]() |
Multi-Axis Driver
![]() |
|
![]() |
● EtherCAT Compatible |
Refer to the "DC Input" product line. | |
![]() |
● EtherNet/IP Compatible |
||
![]() |
● PROFINET Compatible |
||
Modbus (TCP, UDP) | - | ||
Modbus (RTU) | ● Built-in Controller Type |
||
I/O | ● Built-in Controller Type |
||
Pulse Input | ● Pulse Input Type With RS-485 Communication Pulse Input Type |
Motor
Cable Type
Motor Type | Frame Size [mm] |
Maximum Holding Torque [N・m] |
Backlash [arcmin] |
Resolution (Resolution Setting: 1000 P/R) [°/Pulse] |
Electromagnetic Brake | |||
---|---|---|---|---|---|---|---|---|
Equipped | Not Equipped | |||||||
![]() |
Standard*1 Single flat face/Straight type/With key |
42 | 0.3~0.77 | - | 0.36 | ○*2 | ○ | |
60*5 | 1.2~2 | ○ | ○ | |||||
85*5 | 2~4 | ○*2 | ○ | |||||
![]() |
Low backlash | TS Geared*3 (Spur gear mechanism) |
42 | 0.65~2.3 | 15~45 | 0.012~0.1 | ○ | ○ |
60 | 1.8~6 | 10~35 | ○ | ○ | ||||
90 | 6~25 | 10~25 | ○ | ○ | ||||
![]() |
Right-Angle FC Geared*4 (Face gear mechanism) |
42 | 0.7~3 | 15~25 | 0.012~0.05 | ○ | ○ | |
60 | 2.5~10.5 | 10~15 | ○ | ○ | ||||
![]() |
PS Geared (Planetary gear mechanism) |
42 | 1~3 | 15 | 0.0072~0.072 | ○ | ○ | |
60 | 3.5~8 | 7~9 | ○ | ○ | ||||
90*5 | 10~37 | ○ | ○ | |||||
![]() |
Non-Backlash |
HPG Geared Shaft Output/Flange Output (Harmonic Planetary®) |
40 | 1.5~2.5 | 3 | 0.04~0.072 | ○ | ○ |
60 | 5.9~9 | ○ | ○ | |||||
90 | 10~24 | 0.024~0.072 | ○ | ○ | ||||
![]() |
Harmonic Geared (Harmonic Drive®) |
42 | 3.5~5 | 0 | 0.0036~0.0072 | ○ | ○ | |
60 | 7~10 | ○ | ○ | |||||
90 | 33~52 | ○ | ○ |
- Harmonic Planetary® and Harmonic Drive® are registered trademark or trademark of Harmonic Drive Systems Inc.
- *1
- You can choose the shaft shape fromsingle flat face/straight type/with key. (With key : The frame size of 42 mm is forAZM48 only)
- *2
- AZM46, AZM98 only
- *3
- Cable outlet direction can be selected from 4 directions (down/up/right/left) with respect to the output shaft.
- *4
- Click here for details of the Right-Angle FC Geared Type.
- *5
- The AZX Series is available for higher torque in the high-speed range. For more information about the product, Please check here.
Connector Type (IP66)
Motor Type | Frame Size [mm] |
Maximum Holding Torque [N・m] |
Backlash [arcmin] |
Resolution (Resolution Setting: 1000 P/R) [°/Pulse] |
Electromagnetic Brake | |||
---|---|---|---|---|---|---|---|---|
Equipped | Not Equipped | |||||||
![]() |
Standard Single flat face/Straight type/With key |
42 | 0.3~0.77 | - | 0.36 | ○ | ○ | |
60 | 1.2~2 | ○ | ○ | |||||
![]() |
Low backlash |
TS Geared*1 (Spur gear mechanism) |
42 | 0.65~2.3 | 15~45 | 0.012~0.1 | ○ | ○ |
60 | 1.8~6 | 10~35 | ○ | ○ | ||||
![]() |
Right-Angle FC Geared*2 (Face gear mechanism) |
42 | 0.7~3 | 15~25 | 0.012~0.05 | ○ | ○ | |
60 | 2.5~10.5 | 10~15 | ○ | ○ | ||||
![]() |
PS Geared (Planetary gear mechanism) |
42 | 1~3 | 15 | 0.0072~0.072 | ○ | ○ | |
60 | 3.5~8 | 7~9 | ○ | ○ | ||||
![]() |
Non-Backlash |
Harmonic Geared (Harmonic Drive®) |
42 | 3.5~5 | 0 | 0.0036~0.0072 | ○ | ○ |
60 | 7~10 | ○ | ○ |
- *1
- Connector direction can be selected from 4 directions (down/up/right/left) with respect to the output shaft.
- *2
- Click here for details of the Right-Angle FC Geared Type.
Electric Actuators
-
Hollow Rotary Actuator
This actuator is ideal for index drive applications, with a rotary table mechanism integrated into the motor.
DGII Series
High power drive is possible due to the speed reduction mechanism inside the actuator.
-
Vertical Direction -
Horizontal Direction
Frame Size
[mm]Output Table Supporting Bearing Diameter of Hollow Section
[mm]Gear Ratio Motor Direction Permissible Torque
[N・m]Permissible Moment
[N・m]Permissible Axial Load
[N]Power Supply Input 60 Deep-Groove Ball Bearing φ28 18 Vertical 0.9 2 100 DC 85 Cross-Roller Bearing φ33 12 Horizontal 3 10 500 AC/DC 18 Vertical/Horizontal 4.5 36 Horizontal 9 130 φ62 18 Vertical/Horizontal 12 50 2000 36 Horizontal 24 200 φ100 18 Vertical 50 100 4000 AC -
-
Electric Cylinder
The motor is integrated with a linear motion mechanism. This is an ideal actuator for pushing and pulling loads.
EAC Series
An electric cylinder. 2 types of cylinder sections are available: Straight type and reversed motor type.
-
Straight Type
Standard -
Reversed Motor Type
Standard -
Straight Type
(With shaft guide) -
Reversed Motor Type
(With shaft guide)
Type Frame Size
[mm]Model Maximum Transportable Mass
[kg]Thrust
[N]Stroke
[mm]Power Supply Input
[V]Electromagnetic Brake Equipped Not Equipped Straight Type
Standard28 × 28 EACM2 Horizontal 15/Vertical 5 ~50 50~150
(50 mm increments)24 VDC - ○ 42 × 42 EACM4 Horizontal 30/Vertical 14 ~140 50~300
(50 mm increments)Single-Phase 100-120 VAC
Single-Phase 200-240 VAC
Three-Phase 200-240 VAC
24/48 VDC○ ○ 60 × 60 EACM6 Horizontal 60/Vertical 30 ~400 ○ ○ Straight Type
With Shaft Guide Cover28 × 86 EACM2W Horizontal 15/Vertical 4.5 ~50 50~150
(50 mm increments)24 VDC - ○ Straight Type
With Shaft Guide
With Shaft Guide Cover42 × 114 EACM4W Horizontal 30/Vertical 13 ~140 50~300
(50 mm increments)Single-Phase 100-120 VAC
Single-Phase 200-240 VAC
Three-Phase 200-240 VAC
24/48 VDC○ ○ 60 × 156 EACM6W Horizontal 60/Vertical 28 ~400 ○ ○ Reversed Motor Type
Standard42 × 42 EACM4R Horizontal 30/Vertical 12.5 ~125 50~300
(50 mm increments)○ ○ 60 × 60 EACM6R Horizontal 60/Vertical 30 ~360 ○ ○ Reversed Motor Type
With Shaft Guide
With Shaft Guide Cover42 × 114 EACM4RW Horizontal 30/Vertical 11.5 ~125 50~300
(50 mm increments)○ ○ 60 × 156 EACM6RW Horizontal 60/Vertical 28 ~360 ○ ○ -
-
Electric Linear Slides
The motor is integrated with a linear motion mechanism. This is an ideal actuator for transporting loads.
EZS Series
The simple dust-resistant structure made from a stainless steel sheet prevents ingress of foreign particles and reduces emission of dust. 2 types of linear slide sections are available: Straight type and reversed motor type.
-
Straight Type -
Reversed Motor Type
Type Linear Slide Width × Height
[mm]Model Maximum Transportable Mass
[kg]Stroke
[mm]Power Supply Input
[V]Straight Type Reversed Motor Type 54 × 50 EZSM3 Horizontal 15/Vertical 7 50~700 (50 mm increments) Single-Phase 100-120 VAC
Single-Phase/Three-Phase 200-240 VAC
24/48 VDC74 × 50 EZSM4 Horizontal 30/Vertical 14 50~700 (50 mm increments) 74 × 66.5 EZSM6 Horizontal 60/Vertical 30 50~850 (50 mm increments) EZS Series for Clean Room Use
While maintaining the functionality and performance of the EZS Series, this product uses low-dust clean grease for ball screws, guides, and bearings to achieve clean room standards (ISO Standards Class 3).
Type Linear Slide Width × Height
[mm]Model Maximum Transportable Mass
[kg]Stroke
[mm]Power Supply Input
[V]Straight Type Reversed Motor Type 54 × 50 EZSM3 Horizontal 15/Vertical 7 50~700 (50 mm increments) Single-Phase 100-120 VAC
Single-Phase/Three-Phase 200-240 VAC
24/48 VDC74 × 50 EZSM4 Horizontal 30/Vertical 14 50~700 (50 mm increments) 74 × 66.5 EZSM6 Horizontal 60/Vertical 30 50~850 (50 mm increments) -
-
Rack-and-Pinion
The motor is integrated with a linear motion mechanism. This is an ideal actuator for pushing and pulling loads.
L Series
This product offers 2 types, horizontal and vertical, for high mounting versatility. In addition to high precision positioning, it can also transport heavy loads to a maximum of 100 kg.
-
Horizontal (B Type) -
Vertical (F Type)
Rack Moving Direction Frame Size
[mm]Type Power Supply Input Transportable Mass
[kg]Operating Speed Range
[mm/s]Stroke
[mm]Motor Electromagnetic Brake Horizontal (B Type) Vertical (F Type) 60 High Speed AC 7 0~500 100~800 AZM66 Without/With 10 0~250 DC 5 0~200 100~500 10 0~100 Large Transportable Mass AC 30 0~90 100~800 DC 0~50 100~500 80 High Speed AC 7 0~500 100~1,000 20 0~250 DC 7 0~150 20 0~60 Large Transportable Mass AC 70 0~40 100 0~20 DC 50 0~20 100 0~10 -
Related Products
Servo Motor AZX Series
A servo motor equipped with built-in battery-free absolute encoder.
Demonstrating high torque at high speeds makes it suitable for use of positioning with large travel amount.
Since the basic operation method is the same as that of the AZ Series, they can be easily used together within the equipment.

Drivers
Compatible Interface | Driver Type | ||
---|---|---|---|
Single Axis Driver
![]() |
mini Driver
![]() |
Multi-Axis Driver
![]() |
|
![]() |
● EtherCAT Compatible |
● EtherCAT Compatible |
● EtherCAT Compatible |
![]() |
● EtherNet/IP Compatible |
● EtherNet/IP Compatible |
- |
![]() |
● PROFINET Compatible |
● PROFINET Compatible |
- |
Modbus (TCP, UDP) | - | ● Ethernet Type |
- |
Modbus (RTU) | ● Built-in Controller Type |
● RS-485 Communication Type |
- |
I/O | ● Built-in Controller Type |
- | - |
Pulse Input | ● Pulse Input Type With RS-485 Communication Pulse Input Type |
● Pulse Input Type With RS-485 Communication |
- |
Motor
Cable Type
Motor Type | Frame Size [mm] |
Maximum Holding Torque [N・m] |
Backlash [arcmin] |
Resolution (Resolution Setting: 1000 P/R) [°/Pulse] |
Electromagnetic Brake | |||
---|---|---|---|---|---|---|---|---|
Equipped | Not Equipped | |||||||
![]() |
Standard*1 Single flat face/Straight type /With key |
20 | 0.02~0.036 | - | 0.36 | - | ○ | |
28 | 0.095~0.19 | - | ○ | |||||
42 | 0.37~0.77 | ○*2 | ○ | |||||
60 | 1~2 | ○ | ○ | |||||
![]() |
Low backlash | TS Geared*3 (Spur gear mechanism) |
42 | 0.65~2.3 | 15~45 | 0.012~0.1 | ○ | ○ |
60 | 1.8~6 | 10~35 | ○ | ○ | ||||
![]() |
Right-Angle FC Geared*4 (Face gear mechanism) |
35 | 0.3~1.1 | 25~40 | 0.0144~0.05 | - | ○ | |
42 | 0.7~3 | 15~25 | 0.012~0.05 | ○ | ○ | |||
60 | 2.5~10.5 | 10~15 | ○ | ○ | ||||
![]() |
PS Geared (Planetary gear mechanism) |
28 | 0.3~0.5 | 35 | 0.036~0.05 | - | ○ | |
42 | 1~3 | 15 | 0.0072~0.072 | ○ | ○ | |||
60 | 3.5~8 | 7~9 | ○ | ○ | ||||
![]() |
Non-Backlash | HPG Geared Shaft Output/Flange Output (Harmonic Planetary®) |
40 | 1.5~2.5 | 3 | 0.04~0.072 | ○ | ○ |
60 | 5.9~9 | ○ | ○ | |||||
![]() |
Harmonic Geared (Harmonic Drive®) |
30 | 1.8~ 2.4 | 0 | 0.0036~0.0072 | - | ○ | |
42 | 3.5~5 | ○ | ○ | |||||
60 | 7~10 | ○ | ○ |
- *1
- Shaft Shapesingle flat face/straight type/wihe key You can choose from those selections. (With key : The frame size of 42 mm is forAZM48 only)
- *2
- AZM46 only
- *3
- Cable outlet direction can be selected from 4 directions (down/up/right/left) with respect to the output shaft.
- *4
- Click here for details of the Right-Angle FC Geared Type.
Connector Type (IP66)
Motor Type | Frame Size [mm] |
Maximum Holding Torque [N・m] |
Backlash [arcmin] |
Resolution (Resolution Setting: 1000 P/R) [°/Pulse] |
Electromagnetic Brake | |||
---|---|---|---|---|---|---|---|---|
Equipped | Not Equipped | |||||||
![]() |
Standard Single flat face/Straight type/With key |
42 | 0.3~0.77 | - | 0.36 | ○ | ○ | |
60 | 1~2 | ○ | ○ | |||||
![]() |
Low backlash |
TS Geared*1 (Spur gear mechanism) |
42 | 0.65~2.3 | 15~45 | 0.012~0.1 | ○ | ○ |
60 | 1.8~6 | 10~35 | ○ | ○ | ||||
![]() |
Right-Angle FC Geared*2 (Face gear mechanism) |
42 | 0.7~3 | 15~25 | 0.012~0.05 | ○ | ○ | |
60 | 2.5~10.5 | 10~15 | ○ | ○ | ||||
![]() |
PS Geared (Planetary gear mechanism) |
42 | 1~3 | 15 | 0.0072~0.072 | ○ | ○ | |
60 | 3.5~8 | 7~9 | ○ | ○ | ||||
![]() |
Non-Backlash |
Harmonic Geared (Harmonic Drive®) |
42 | 3.5~5 | 0 | 0.0036~0.0072 | ○ | ○ |
60 | 7~10 | ○ | ○ |
- *1
- Connector direction can be selected from 4 directions (down/up/right/left) with respect to the output shaft.
- *2
- Click here for details of the Right-Angle FC Geared Type.
Electric Actuators
-
Hollow Rotary Actuator
The motor is integrated with a rotating table mechanism. This is an ideal actuator for index drive applications.
DGII Series
High power drive is possible due to the speed reduction mechanism inside the actuator.
-
Vertical Direction -
Horizontal Direction
Frame Size
[mm]Output Table Supporting Bearing Diameter of Hollow Section
[mm]Gear Ratio Motor Direction Permissible Torque
[N・m]Permissible Moment
[N・m]Permissible Axial Load
[N]Power Supply Input 60 Deep-Groove Ball Bearing φ28 18 Height 0.9 2 100 DC 85 Cross-Roller Bearing φ33 12 Width 3 10 500 AC/DC 18 Height/Width 4.5 36 Width 9 130 φ62 18 Height/Width 12 50 2000 36 Width 24 200 φ100 18 Height 50 100 4000 AC -
-
Compact Electric Cylinder/Electric Cylinder
The motor is integrated with a linear motion mechanism. This is an ideal actuator for pushing and pulling loads.
DR Series
Compact electric cylinders of 20 mm and 28 mm frame sizes with αSTEP and ball screw integrated.
-
Table Type -
Rod Type
Type Frame Size Stroke Ball Screw Cable Outlet Direction Installation Plate Product Line Lead Table Type 20 mm 25 mm Precision, Without Cover
/
Precision, With Cover1 mm Down/Right/Left Without/
With Flange/
With Foot28 mm 30 mm Rolled, Without Cover
/
Rolled, With Cover1 mm Precision, Without Cover
/
Precision, With Cover1 mm
/
2.5 mmRod Type 20 mm 25 mm Precision, Without Cover
/
Precision, With Cover1 mm Up/Down/
Right/LeftWithout 28 mm 30 mm Rolled, Without Cover
/
Rolled, With Cover1 mm Without/
With FootPrecision, Without Cover
/
Precision, With Cover1 mm
/
2.5 mmDRS2 Series
Compact electric cylinders of 42 mm and 60 mm frame sizes with αSTEP and ball screw integrated.
-
With Guide -
Without Guide
Type Frame Size
[mm]Stroke
[mm]Screw Power Supply Voltage
[V]Driver Type Connection Cable Set With Guide 42 40 Rolled, Precision 24/48 VDC Built-in Controller
Pulse Input With RS-485 Communication
Pulse Input
EtherNet/IP Compatible
EtherCAT Compatible0.5 m~20 m
Without Electromagnetic Brake
With Electromagnetic BrakeWithout Guide 42 40 Rolled, Precision 60 50 Rolled EAC Series
An electric cylinder. 2 types of cylinder sections are available: Straight type and reversed motor type.
-
Straight Type
Standard -
Reversed Motor Type
Standard -
Straight Type
(With shaft guide) -
Reversed Motor Type
(With shaft guide)
Type Frame Size
[mm]Model Maximum Transportable Mass
[kg]Thrust
[N]Stroke
[mm]Power Supply Input
[V]Electromagnetic Brake Equipped Not Equipped Straight Type
Standard28 × 28 EACM2 Horizontal 15/Vertical 5 ~50 50~150
(50 mm increments)24 VDC - ○ 42 × 42 EACM4 Horizontal 30/Vertical 14 ~140 50~300
(50 mm increments)Single-Phase 100-120 VAC
Single-Phase 200-240 VAC
Three-Phase 200-240 VAC
24/48 VDC○ ○ 60 × 60 EACM6 Horizontal 60/Vertical 30 ~400 ○ ○ Straight Type
With Shaft Guide Cover28 × 86 EACM2W Horizontal 15/Vertical 4.5 ~50 50~150
(50 mm increments)24 VDC - ○ Straight Type
With Shaft Guide
With Shaft Guide Cover42 × 114 EACM4W Horizontal 30/Vertical 13 ~140 50~300
(50 mm increments)Single-Phase 100-120 VAC
Single-Phase 200-240 VAC
Three-Phase 200-240 VAC
24/48 VDC○ ○ 60 × 156 EACM6W Horizontal 60/Vertical 28 ~400 ○ ○ Reversed Motor Type
Standard42 × 42 EACM4R Horizontal 30/Vertical 12.5 ~125 50~300
(50 mm increments)○ ○ 60 × 60 EACM6R Horizontal 60/Vertical 30 ~360 ○ ○ Reversed Motor Type
With Shaft Guide
With Shaft Guide Cover42 × 114 EACM4RW Horizontal 30/Vertical 11.5 ~125 50~300
(50 mm increments)○ ○ 60 × 156 EACM6RW Horizontal 60/Vertical 28 ~360 ○ ○ -
-
Electric Linear Slides
The motor is integrated with a linear motion mechanism. This is an ideal actuator for transporting loads.
EZS Series
The simple dust-resistant structure made from a stainless steel sheet prevents ingress of foreign particles and reduces emission of dust. 2 types of linear slide sections are available: Straight Type and Reversed Motor Type.
-
Straight Type -
Reversed Motor Type
Type Linear Slide Width × Height
[mm]Model Maximum Transportable Mass
[kg]Stroke
[mm]Power Supply Input
[V]Straight Type Reversed Motor Type 54 × 50 EZSM3 Horizontal 15/Vertical 7 50~700 (50 mm increments) Single-Phase 100-120 VAC
Single-Phase/Three-Phase 200-240 VAC
24/48 VDC74 × 50 EZSM4 Horizontal 30/Vertical 14 50~700 (50 mm increments) 74 × 66.5 EZSM6 Horizontal 60/Vertical 30 50~850 (50 mm increments) EZS Series for Clean Room Use
While maintaining the functionality and performance of the EZS Series, this product uses low-dust clean grease for ball screws, guides, and bearings to achieve clean room standards (ISO Standards Class 3).
Type Linear Slide Width × Height
[mm]Model Maximum Transportable Mass
[kg]Stroke
[mm]Power Supply Input
[V]Straight Type Reversed Motor Type 54 × 50 EZSM3 Horizontal 15/Vertical 7 50~700 (50 mm increments) Single-Phase 100-120 VAC
Single-Phase/Three-Phase 200-240 VAC
24/48 VDC74 × 50 EZSM4 Horizontal 30/Vertical 14 50~700 (50 mm increments) 74 × 66.5 EZSM6 Horizontal 60/Vertical 30 50~850 (50 mm increments) -
-
Rack-and-Pinion
The motor is integrated with a linear motion mechanism. This is an ideal actuator for pushing and pulling loads.
L Series
This product offers 2 types, horizontal and vertical, for high mounting versatility. In addition to high precision positioning, it can also transport heavy loads to a maximum of 100 kg.
-
Horizontal (B Type) -
Vertical (F Type)
Rack Moving Direction Frame Size
[mm]Type Power Supply Input Transportable Mass
[kg]Operating Speed Range
[mm/s]Stroke
[mm]Motor Electromagnetic Brake Horizontal (B Type) Vertical (F Type) 60 High Speed AC 7 0~500 100~800 AZM66 Without/With 10 0~250 DC 5 0~200 100~500 10 0~100 Large Transportable Mass AC 30 0~90 100~800 DC 0~50 100~500 80 High Speed AC 7 0~500 100~1,000 20 0~250 DC 7 0~150 20 0~60 Large Transportable Mass AC 70 0~40 100 0~20 DC 50 0~20 100 0~10 -
-
Electric Gripper
This is an electric gripper for which you can freely set the gripping force, gripping time and speed according to the object to be gripped.
EH Series
It achieves a delicate "grasp" similar to human fingertips, and assists in automation and labor saving.
-
EH3 -
EH4
Maximum Gripping Force Stroke
(Both sides)Minimum Travel Amount
(Both sides)Size Mass EH3-AZAKH 7 N 0~15 mm 0.02 mm W 42.5 mm × D 80.5 mm × H 36 mm 200 g EH4-AZAKH 25 N 0~25 mm W 48.5 mm × D 91 mm × H 46 mm 380 g -